WPS-200 (Wafer Packaging System)

WPS-200 is an advanced system for packaging, shipping and storage of IC wafers with enhanced protection against contamination and ESD events.

With a capacity to load up to fifty 150-200mm wafers into a shipping box, the WPS-200 can unload two full cassettes without operator intervention. “Touch Sensitive” wafer handling eliminates chipping and fractures caused by manual processing.

Standard features include; a shipping box staging area, separator staging area, cassette staging area, “Touch Sensitive” end effector, operator interface panel, Genmark automation robot, GE Fanuc PLC and process status display.

Optional features include; optical character recognition, flat or notch orientation, automated interface with existing systems, sorting by host computer and tooling to adapt to the shipping boxes and separators currently in use.