Wafer Transfer Machine

ATI’s Wafer Transfer System is a fully automated process station that transfers silicon wafers from standard process cassettes into specialized “etch process” wafer carriers. The machine was developed to reduce handling error and significantly increase operator productivity. Our automated transfer system is significantly faster than a manual operation and leaves the operators free to perform other tasks.

The system will stay online and transfer all wafers within a lot into etch carriers, before requiring new lot instructions. When additional product is required the display will prompt the operator to unload empty cassettes and add full ones. A number of functions are monitored with a variety of sensors so the machine is able to provide feedback if there are any adjustments that need attention. This feature enhances efficiency by reducing total lot run time and virtually eliminating product damage.