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Wafer Transfer Systems

Wafer Buffer Machine

The Wafer Buffer Station was designed to transfer wafers from a Wafer Scrubber unit to a Wax-Mount line. It uses 2 staging cassettes to act as a buffer between the scrubbing process and the wax-mount process.

Wafers are stored and removed from the cassettes by the robot in a "first in - first out" sequence. This entire component (including robot and buffer cassettes) is enclosed in a mini environment to control particulate contamination.

Features:

  • CONTROLS:
    GE Fanuc PLC,
    Genmark (Robot) Controller,
    Uticor OIU.
  • DISCRETE I/O:  32 I/O POINTS.
  • ENVIRONMENT:
    Class 1000 Clean Room Production Area.

Specifications:

  • PLC CONTROLS
  • ROBOTIC MOTION CONTROL.
  • POWER REQUIREMENTS:
    110 VAC Single Phase.
    15 FLA.