|
The Wafer Buffer Station was designed to transfer wafers from a Wafer Scrubber unit to a Wax-Mount line. It uses 2 staging cassettes to act as a buffer between the scrubbing process and the wax-mount process.
Wafers are stored and removed from the cassettes by the robot in a "first in - first out" sequence. This entire component (including robot and buffer cassettes) is enclosed in a mini environment to control particulate contamination.
|