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Semiconductor Silicon Wafer Manufacturing

Automation Technology Inc. has developed cost-effective, reliable vacuum packaging equipment to meet our customers' demanding performance specifications while saving valuable clean room space.

Our equipment achieves a dynamic range of process recipes through PLC-controlled operations. A variety of models are available, each one designed to provide the most beneficial features for each customer's wafer packaging needs.

Options range from a manual process to a fully automatic process with nitrogen gas purge function. Multiple table options are available to create an effective ergonomic vacuum packaging station to meet semi-conductor and other clean room wafer shipping requirements.

Select any of the links below for more information.

VS-100 VS-300 VPS-200