Final Polish Slurry

The Final Polish Slurry System is designed to supply 2 polisher units with various slurry types. There are 2 independant slurry mix and delivery systems on board. Up to 2 concentrates and IPA are metered in 3 small beakers. These fluids and DI water are combined, mixed, and heated in a mixing tank by a circulation pump.

Once mixed, the solution is transferred to a supply tank and continues to be heated and mixed. Each supply tank circulates slurry through a loop where polishing equipment draws slurry as needed. The system stores the recipes in the onboard PLC controller.