Polishing Line Support System

The Polishing Line Support System automates plate handling from the polishing line through demount and subsequent storage into carts. During transfer of the polishing plates from the polishing line to plate carts, polished wafers are automatically demounted from the polishing plate and stored in DI water.

Systems are designed to handle the proper plate diameter and thickness for your operation. Equipped to handle one plate at a time in batches of four, the Automated Plate Handling System consists of the polishing loader, polishing offloader, plate cart loader and automatic demounter.