ATI’s Polishing Plate Handling Systems completely automates the transfer and handling of polishing plates within a polishing cell.
Our systems automatically provide the input to the polishing line, receive the output of the polishing line, provide the wafer demounting process, then transfer the polishing plates to either a wax mount process or into storage carts.
Features:
Completely integrated with upstream and downstream wafer processing equipment.
Fully automatic operation, enables operators to perform other tasks
PLC controlled conveyor, loader, unloader and demounting system.
Alarms and light tower for effective status notification.
