Template Type Demounter

The Template Type Wafer Demounter removes freshly polished wafers from polishing plate carrier pockets using water jets, then transfers the wafers into cassettes submerged in DI water.

By employing a wafer sensing system to control a rotating turntable that supports the carrier plate, our system automatically positions a wafer for demounting. A water jet then flushes a wafer from the carrier pocket and onto a waterslide, which then transfers the wafers into a cassette. A water cushion between the wafer and the slide protects the wafer from abrasion damage. As individual wafers are cassetted, an elevator lowers the cassette, one slot at a time into a water tank. The demounted wafers are stored, “submerged” in DI water, until an operator retrieves them using the system’s cassette return feature.

Change over to various size wafers is easily accomplished via adjustable water slide guide rails, an adjustable water jet head and a selector switch. Once started, the machine will process an entire carrier without operator intervention.

Various ATI template type demounter models are available for single or multiple wafer sizes ranging from 100mm to 300mm diameters. All models have a convenient control panel located in front to make wafer size selection easy. Tool configurations range from manual operation to fully automated systems. An additional special feature also allows the ability select vacant slots in partially filled cassettes.